Xi’an Huaheng Instrument Co., Ltd.
XAVITECH MICROPUMPS AB
Vögtlin Instruments GmbH
TOFLO CORPORATION
Teledyne Hastings Instruments
Sierra Instruments, Inc.
Sierra Instruments
Shanghai Yangji Electronic Technology Co., Ltd
Sensirion
RJM Sales, Inc.
Q&T Instrument
Proportion-Air, Inc.

37 Mass Flow Controller Manufacturers in 2024

This section provides an overview for mass flow controllers as well as their applications and principles. Also, please take a look at the list of 37 mass flow controller manufacturers and their company rankings. Here are the top-ranked mass flow controller companies as of March, 2024: 1.Brooks Instrument, 2.Plasma Etch, Inc., 3.Alicat Scientific.

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List of 37 Mass Flow Controller Manufacturers

*Including some distributors, etc.

Sort by Features

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  • Company Size: largest first
  • Year Founded: oldest first
  • Year Founded: earliest first

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  • United States of America
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    • Sierra Instruments
      • United States of America Address: 5 Harris Court, Building L Monterey, California, United States of America

      Manufacturer Overview

      Sierra Instruments, founded in 1971, is a manufacturer of flow measurement solutions for the gas, liquid, and steam sectors. The product line has incline or insertion mass flow controllers/meters, level switches, flow conditioners, calibration systems, and mass flow sensors. The company provides digital communication protocols to automate flow meters and software upgrades & improvements. The company in Monterey, CA, offers a 12-month limited warranty, is ISO 9001 registered, and is a member of the TASI group.

    • Eastern Instruments
      • United States of America Address: 416 Landmark Drive Wilmington, North Carolina, United States of America

      Manufacturer Overview

      Eastern Instruments is an American manufacturer of flow measurement equipment and systems that was established in 1984. From their 26,000 sq ft facility in Wilmington, North Carolina, the company produces mass flow meters, feeders, airflow devices, and control systems for air, gas, or solid particles. These are used in various industrial processes within the petrochemical, energy, food, and agricultural sectors. Eastern Instruments also offers clients contract manufacturing and on-site support services such as product installation, maintenance, and repair.

    • Alicat Scientific
      • United States of America Address: 7641 N. Business Park Drive, Tucson, Arizona, United States of America

      Manufacturer Overview

      Alicat Scientific, established in 1991, and based in Arizona, USA, is a manufacturer and supplier of flow and pressure instrumentation. The product portfolio includes a diverse range of mass flow meters and controllers, liquid flow meters and controllers, pressure transducers and controllers, accessories, and replacement parts. The products are used in various industries which include aerospace, defense, bioreactors, calibration, metrology, food, environmental, glass, and optical. The company products have ISO certifications. The company also offers technical instrumentation documentation with support and services.

    • Sierra Instruments, Inc.
      • United States of America Address: 5 Harris Court, Building L, Monterey, California, United States of America

      Manufacturer Overview

      Sierra Instruments, Inc. was established in 1973 and has its headquarters in California, United States. The company is a manufacturer of flow instruments for nearly every liquid, gas, and steam application, with locations in Europe and China. Sierra's range of flow instruments includes immersible thermal mass flow meters, vortex flow meters, and thermal mass flow controllers for various applications. The company's flow controllers have applications across global industries such as oil and gas, energy management, biotech, and aerospace.

    • Brooks Instrument
      • United States of America Address: 407 West Vine Street, Hatfield, Pennsylvania, United States of America

      Manufacturer Overview

      Brooks Instrument, established in 1946 and currently a subsidiary of Illinois Tool Works Inc. (ITW), is an American manufacturer with its global headquarters in Hatfield, Pennsylvania, specializing in flow and pressure measurement and control technology. The company’s offerings encompass various mass flow controllers and meters, tailored for heat treating, cutting, and other thermal processes for mass flow sensors. Additionally, the company delivers pressure and vacuum controller technology for original equipment manufacturers (OEMs). It develops vaporization technology, utilized in industrial and semiconductor processes, for water vaporization or humidification, along with variable area (VA) flow meters (rotameters) for liquid or gas flow measurement.

    • Plasma Etch, Inc.
      • United States of America Address: 3522 Arrowhead Drive Carson City, Nevada, United States of America

      Manufacturer Overview

      Plasma Etch, Inc., established in 1982 and headquartered in Reno, Nevada, is a manufacturer and supplier of plasma cleaning and etching systems. Their range of products includes plasma cleaners, utilized for removing contaminants like organic residues, metal oxides, and particulates from surfaces in semiconductor, medical device, and printed circuit board manufacturing. Plasma etchers are employed for material etching, while plasma bonders are used to bond materials like metals, plastics, and ceramics. Additionally, they offer plasma adhesion promoters to enhance material adhesion and surface modification services to modify properties like wettability and corrosion resistance.

    • Hi-Tech Furnace System, Inc.
      • United States of America Address: 13179 West Star Drive, Shelby Township, Michigan, United States of America

      Manufacturer Overview

      Hi-Tech Furnace Systems Inc., located in Shelby Township, Michigan has been a manufacturer and installer of retort style furnace systems since 1990. Its offerings encompass Fluoride Ion Cleaning (FIC) Systems, effectively removing contaminants from metal surfaces and proving advantageous for turbine engine components. Additionally, its Chemical Vapor Deposition (CVD) Systems deposit protective films onto metal substrates, elevating the quality of parts. Complementing these solutions are Vapor Phase Coating (VPC) Systems and Gas Delivery Systems, further enhancing its comprehensive array of specialized services.

    • RJM Sales, Inc.
      • United States of America Address: 12H Worlds Fair Drive Somerset, New Jersey, United States of America

      Manufacturer Overview

      RJM Sales was founded in 1970 and is now headquartered in Somerset, New Jersey. The company is an employee-owned manufacturer’s representative and distribution company of industrial instrumentation and controls, filtration, gas generation, and laboratory instrumentation products. The company serves a breadth of industries including food, pharmaceuticals, coil & gas, chemical, power generation, and other markets. The company’s two main product categories are Industrial Products and Laboratory Products. Industrial Products include signal conditioners, digital indicators, and moisture analysis equipment. Laboratory Products include YSI reagents, maintenance kits, and other supplies.

    • Kelly Pneumatics, Inc.
      • United States of America Address: 1611 Babcock St., Newport Beach, California, United States of America

      Manufacturer Overview

      Kelly Pneumatics was established in 2004 and is based out of Newport Beach, California. The company is a designer and manufacturer of proportional valves, pressure regulators, and pneumatic control products for numerous industries including medical, alternative energy, test equipment, semiconductor equipment, and gas analyzers. The company’s standard products include proportional valves, pressure regulators, flow controllers, flow sensors and meters, and electronic boards. The company provides custom solutions for pneumatic valves, regulators, and control products to match customers’ needs. These include analyzing, engineering, prototyping, and testing.

    • MKS Instruments
      • United States of America Address: 2 Tech Drive,Suite 201,Andover, Massachusetts, United States of America

      Company Overview

      MKS Instruments, founded in 1961 and based in Massachusetts, USA, is a manufacturer and distributor of instruments and process control solutions for advanced manufacturing processes. Its solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, feature enhancement, and optimized connectivity. Its offerings include compact pressure transducers, mass flow meters, and microwave generators, used in advanced manufacturing and metrology applications. The company is certified to ISO 9001:2015, and has received an Innovators Award for its ESI CapStone system.

    • Aalborg Instruments & Controls, Inc.
      • United States of America Address: 20 Corporate Drive, Orangeburg, New York, United States of America

      Company Overview

      Aalborg Instruments & Controls, Inc., established in 1972 in Orangeburg, New York, USA, is a manufacturer and supplier of precision instrumentation for flow measurement and control. The company's product range includes Mass Flow Controllers, Variable Area Flow Meters, Paddle Wheel Flowmeters, Flow Control Valves, and Peristaltic Pumps, catering to industries requiring accurate flow measurements and controls such as research, industrial processes, and manufacturing. Its services include product manufacturing, flow calibration, and technical assistance. With a long period of experience, the company consistently exceeds expectations in precision and service.

    • Fluid Components International
      • United States of America Address: 1755 La Costa Meadows Drive, San Marcos, California, United States of America

      Company Overview

      Fluid Components International, founded in San Marcos, CA, in 1964 is a manufacturer of thermal mass flow meters, flow switches and level switches for industrial process measurement applications. The company's product portfolio includes Flow Switch, Flow Conditioners, Gas Flow Meter, Level Measurement Products, and Flow Straighteners. The company serves markets including Medical and Healthcare, Aerospace and Defense, Consumer Goods, Industrial Manufacturing and Construction and Building. The company also provides services including national distribution, product selection, customized services, technical support and customer service.

    • Fluigent
      • France Address: 67 avenue de Fontainebleau Le Kremlin-Bicêtre, France

      Manufacturer Overview

      Fluigent, founded in 2005 and located in Le Kremlin-Bicêtre, France, is a developer and manufacturer of fluid control systems.   The company offers a broad range of products that include microfluidic devices, modular OEM microfluidic flow controllers, microfluidic OEM pressure controllers, and OEM microfluidic pressure sources. These products find general use in the field of microfluidics, allowing for the precise manipulation and control of small fluid volumes. The company’s products cater to industries, including life sciences for genomics and cell analysis, drug discovery, biotechnology, chemical analysis, and diagnostics.

    • KOFLOC Corp.
      • Japan Address: 1-3 Atenoki, Kusauchi, Kyotanabe, Kyoto, Japan

      Manufacturer Overview

      KOFLOC Corporation, established in 1949, is a manufacturer and retailer of standard and off-catalog custom gas generators, precision flow instruments, and engineering devices headquartered in Osaka, Japan. The company manufactures various flow instruments for measuring and controlling fluids, including flow meters, pressure regulating valves, flow control valves, and mass flow controllers and meters. The company’s gas generators are used to generate various gases from the air and water, including nitrogen gas, hydrogen gas, oxygen gas, ozone gas, and clean dry air. KOFLOC is ISO14001: 2006-certified company whose equipment are used in aerospace, water treatment plants, power generation, and refineries.

    • Burkert UK Limited
      • United Kingdom Address: Fluid Control Centre, 1 Bridge End, Cirencester, United Kingdom

      Manufacturer Overview

      Burkert UK Limited, established in 1946 in Cirencester, UK, is a manufacturer of measurement and control systems for liquids and gas. The company, a subsidiary of Burkert Fluid Control Systems, specializes in fluid control systems for various industries. Their product portfolio includes a wide range of products such as solenoid valves, process valves, sensors, controllers, and pneumatic actuators. These solutions cater to various applications in industries like water treatment, food and beverage, pharmaceuticals, and industrial automation. Their fluid control solutions offer numerous benefits, including precise and optimum control of fluids, enhanced process efficiency, reduced energy consumption, and compliance with industry regulations.

    • Vögtlin Instruments GmbH
      • Switzerland Address: St. Jakob-Strasse 84, Muttenz, Switzerland

      Manufacturer Overview

      Vögtlin Instruments GmbH, established in 1986 and based in Muttenz, Switzerland, is a manufacturer of precision gas flow instruments. The company produces products such as mass flow meters of different models and precision control valves used in different applications such as gas analysis, laboratory equipment, life sciences, research & development, test equipment, and OEM applications. All the gas mass flow meters and mass flow controllers manufactured by the company will give analog and digital output while offering IP67/NEMA6 and ATEX protection. The company has technology centers in different countries, such as the USA, Switzerland, Germany, and Great Britain.

    • Azbil Corporation
      • Japan Address: 19F Tokyo Building 2-7-3 Marunouchi, Chiyoda-ku, Tokyo, Japan

      Manufacturer Overview

      The Azbil Corporation (formerly the Yamatak Corporation) aims to realize safety, comfort, and fulfillment in people's lives and contribute to global environmental preservation through "human-centered" automation. They provide their customers with timely solutions via an integrated structure that extends from planning and development to maintenance and service, capable of responding rapidly to customer needs.

    • OVAL Corporation
      • Japan Address: 10-8 Kamiochiai 3-chome, Shinjuku-ku, Tokyo, Japan

      Manufacturer Overview

      OVAL Corporation, founded in Tokyo, Japan, in 1949 is a manufacturer of metrological control equipment and related systems and measuring devices and environmental control related instruments. The company's product portfolio includes batch controllers, flow computers, peripherals and related instruments, system solutions and calibration equipment. Their products are used in industries such as Food and Beverage, Pharmaceutical and Biotechnology, Chemical and Petrochemical, Environmental Testing and healthcare. The company provides services such as Product Selection Guidance, Engineering Support, and Custom Manufacturing.

    • TOFLO CORPORATION
      • Japan Address: 4-3-17 Minamidaira, Hino-shi, Tokyo, Japan

      Manufacturer Overview

      TOFLO CORPORATION was established in 1973 and is a manufacturer of flow sensing and flow control products based in Hino, Tokyo, Japan The company manufactures various flow-related products such as variable area flow meter, flow control valve, vortex flow meter, plastic pressure switch, and metal check valve. The products are used in various applications such as gas management, chemical industries, waste water management, and industrial manufactures. The company had acquired certifications such as ISO 9001 for the Quality Management System and Eco Action 21 for environmental sustainability.

    • Fujikin
      • Japan Address: 2-3-2 Itachibori Nishi-ku, Osaka, Japan

      Manufacturer Overview

      Fujikin was founded in 1930 and headquartered in Itachibori Nishi-ku, Osaka, Japan is a manufacturer of specialized valve equipment. The company offers a wide variety of valves including Ultra-precision valves for semiconductor manufacturing, Cryogenic ultra-precision valves for space exploration, Aseptic process valves for pharmaceutical and food manufacturing, valves for new energy and rechargeable batteries, and valves for nuclear power plant instrumentation. Additionally, the company has diversified its portfolio to include the development of cutting-edge medical equipment. This expansion includes the creation of ultrasonic diagnostic equipment, universal X-ray photography devices, telemedicine systems, and healthcare monitoring devices.

    • HORIBA
      • Japan Address: 2Miyanohigashi, Kisshoin, Minami-ku, Kyoto, Japan

      Manufacturer Overview

      HORIBA RADIO LABORATORY was established in Japan in 1945 and has spent the last three-quarters of a century growing as an R&D company and engaged in international operations. HORIBA Scientific offers 200 years of experience developing high-performance scientific instruments and analytical solutions. The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing, and metrology to a broad range of scientific R&D and QC measurements. Operating in Asia, Europe, and North and South America, HORIBA scientific develops solutions that go beyond just products.

    • Q&T Instrument
      • China Address: No. 1, Wangbai Road, Huanglong Area, Kaifeng County, Kaifeng, Henan, China

      Manufacturer Overview

      Q&T Instrument, established in 2005, and based in Henan, China, is a manufacturer and supplier of flow meters. The product portfolio has a diverse range of flow meters which includes electromagnetic, vortex, ultrasonic, turbine, mass, rotameter, level meter, mask, thermometer, radar, and oval gear flow meter. The products are used in various applications which include liquid flow, gas flow, intelligent water meters, level meters, and flow test devices. The company also offers production development with innovation activity.

    • Proportion-Air, Inc.

      Manufacturer Overview

      Proportion-Air, Inc., established in 1985, is a US manufacturer of electronic air pressure regulators and air flow control valves located in McCordsville, Indiana. The company produces various regulators, including flow controllers, pressure transducers, volume boosters, and safety regulators, that accept analog and digital signals. Additionally, they supply auxiliary accessories for their products. The company services several markets, such as industrial manufacturing, transportation, aerospace, pharmaceutical, and food processing. Product uses include water jet cutters, aircraft fuselage testing, and medical testing.

    • Xi’an Huaheng Instrument Co., Ltd.

      Manufacturer Overview

      Xi’an Huaheng Instrument Co., Ltd. is a manufacturer and supplier of various industrial automation instruments based in China. Founded in 2000, the company specializes in a wide range of instruments and devices, including pressure transmitters, level transmitters, flow meters, and HART communicators. One sample product is its pressure transmitters, which are crucial for measuring and monitoring pressure in industrial processes. The company provides professional services to a wide range of industries, including power, petroleum, chemical metallurgical, cement, and more. The company delivers cost-effective industrial automation instrument products to meet the demands of its customers.

    • Teledyne Hastings Instruments

      Manufacturer Overview

      Teledyne Hastings Instruments is a manufacturer of vacuum as well as gas mass flow instruments that was originally established as Hastings-Raydist, Inc. in 1944 before becoming a subsidiary of Teledyne Technologies, Inc. in 1979. The company offers gas mass flow meters for measuring and controlling gas flow rates between 5-15,000slm, vacuum sensors for measuring atmosphere to ultra-high vacuum pressure, and single channel power supplies for operating flow meters or controllers. The company also provides custom manufacturing, calibration, and repair services for its clients.

    • Ohkura Electric Co., Ltd.
      • Japan Address: 1-4-4 Nissaihanamizuki, Sakado-shi, Saitama-ken, Japan

      Company Overview

      Ohkura Electric Co., Ltd., started in 1933 and situated in Sakado, Japan, is a manufacturer and supplier of industrial instruments and semiconductor equipment. The company specifically fabricates system equipment, recorders, temperature controllers, signal converters, and mass flow controllers. It also manufactures furnaces, vertical heat treatment furnaces, pressure transmitters, and thyristor units. The subcategories of its system equipment, machine controllers, are controllers that integrate functions ranging from loop control to sequence control. Its industrial instruments are used in the automation of nuclear power plant systems as well as other industrial fields.

    • BRONKHORST HIGH-TECH B.V.
      • Netherlands Address: Nijverheidsstraat 1A, AK Ruurlo, Netherlands

      Company Overview

      BRONKHORST HIGH-TECH B.V. is a ISO 9001-certified manufacturer of low flow fluid handling products founded in 1981 and headquartered in Ruurlo, the Netherlands. The company produces gas and liquid flow meters and controllers. These include Coriolis mass flow meters, pressure transducers or controllers, and thermal mass flow meters . The company offers calibration, product customization, and technical support for clients needing additional support. Its customers are primarily in the bioprocessing, research, and semiconductor sectors.

    • IKS PVD Technology
      • China Address: No.68-17, Qiuyuehu street,Shenbei New District,Shenyang, Liaoning, China

      Company Overview

      IKS PVD Technology, a company established in 2008, based in Xiangtan, Hunan, China, is a manufacturer and supplier of vacuum coating machines and related accessories. The company Offers product solutions for various industrial and decorative applications such as cutting tools, molds, automotive parts, hardware, jewelry, and glasses. It has a range of products such as magnetron sputtering coating machines, arc evaporation coating machines, multi-arc ion coating machines, and optical coating machines. These products are designed to operate with quality, and durability. It is a chief supplier of vacuum coating machines and related accessories in China and abroad.

    • Sensirion

      Company Overview

      Sensirion is based in Stäfa, Switzerland, and is a manufacturer of various sensor products that was established in 1998 as a spin-off from the Swiss Federal Institute of Technology (ETH Zurich). The company’s product lineup includes gas flow sensors for medical devices such as ventilators, particulate sensors for indoor air quality control applications, and humidity sensors for use in HVAC systems or smart homes. It also offers specialized sensor models, such as for CO2, formaldehyde, and mass flow controllers. The company mainly serves clients in the consumer appliances, medical devices, and public utilities sectors.

    • Shanghai Yangji Electronic Technology Co., Ltd

      Company Overview

      Shanghai Yangji Electronic Technology Co. Ltd is a manufacturer and supplier of various industrial meters that was established in 2012 in Shanghai, China. The company’s product lineup includes heat meters such as mechanical and heat cost allocation models, gas meters such as turbine and diaphragm models, and water meters such as ultrasonic and prepaid models. It also offers electricity meters such as three- and single-phase models. The company’s products are primarily used by clients in the property and facility management sector, as well as in the smart city industry.

    • B & B Instruments, Inc.

      Company Overview

      B&B Instruments (BBI) was incorporated in Indiana in 1972 and still operates out of Indianapolis, Indiana today. BBI is an authorized stocking distributor for manufacturers of measurement, control & calibration equipment for pressure, temperature, flow, humidity, & level instrumentation serving both startups as well as Fortune 500 clients in industries such as utilities, metals, food, process, industrial, OEMs, and technical. BBI’s product categories include calibrators, controllers, meters, flow, gauges, humidity, level, meters, pressure, switches, temperature, and transmitters. Featured products include Autrol Transmitters APPT-3100 Differential Pressure Transmitter, Barksdale’s UDS7 Series Solid State Pressure Switches, Kytronic’s actuator positioner, and Monarch DataChart’s DC1250 2-Channel Paperless Recorder.

Mass Flow Controller Manufacturer Ranking

*Including some distributors, etc.

Derivation Method

The ranking is calculated based on the click share within the mass flow controller page as of March 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.

Number of Employees

  1. Hitachi Metals, Ltd.: 27,771
  2. Azbil Corporation: 10,063
  3. HORIBA: 8,205

Newly Established Company

  1. Q&T Instrument: 2005 (19 years ago)
  2. Fluigent: 2005 (19 years ago)
  3. IBS Co., Ltd.: 1997 (27 years ago)

Company with a History

  1. Fujikin: 1930 (94 years ago)
  2. Ohkura Electric Co., Ltd.: 1933 (91 years ago)
  3. HORIBA: 1945 (79 years ago)

Mass Flow Controller Manufacturers in United States

*Including some distributors, etc.

Global Distribution of Mass Flow Controller Manufacturers by Country

*Including some distributors, etc.

Country Number of Companies Share (%)
United States of America United States of America 12 44.4%
Japan Japan 9 33.3%
China China 2 7.4%
France France 1 3.7%
United Kingdom United Kingdom 1 3.7%
Switzerland Switzerland 1 3.7%
Netherlands Netherlands 1 3.7%

List of Mass Flow Controller Products

42 products are listed.

FCC

Digital mass flow controller

10+ people viewing

It can be used in a wide range of fields, from semiconductors and solar panels to general industries. A high -speed response of 1SEC or less [Solen...


9 models listed

FCC

Mass flow controller

A mass flow rate measurement control instrument that can control high -precision flow. It can also be used in the field of general industries, such...


7 models listed

FCC

Waterproof and dust -proof masflow controller MAXTRAK series

40+ people viewing

A mass flow controller with a waterproof and dustproof specification that can be washed. You can change it to a flange joint as an option. It can b...


5 models listed

FCC

Pilot Module Mass Flow Controller SMARTTRAK Series

A multi -gas multi -range that can be easily operated with a pilot module of full scale flow, measurement gas, output/setting signal. 10 types of m...


11 models listed

FCC

High temperature mass flow controller

It is a digital mass flow controller for high temperature at MAX80 ° C. It can be used in a wide range of fields such as semiconductors, solar pane...


3 models listed

FCC

MGMR mass flow controller

Equipped with a multi -gas multi -range (MG/MR) function, the gas type and flow rate can be easily changed. Eight types of range, from 10SCCM to 50...


3 models listed

FCC

Analog massflow controller / general -purpose model

It can be used in a wide range of fields such as semiconductors, solar panels, fuel cells, and general industries. It is a product that supports RO...


3 models listed

Krone Co., Ltd.

Control flow rate (pressure) controller DPT-Ctrl-2SP series for pressure and air flow

Control the pressure or air flow ■ Applications Filter differential pressure monitoring, interchangeable compression, windtable experiment, fluid ...


1 model listed

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